Advances in Two-Dimensional Dopant Profiling and Imaging of 4H-SiC Devices
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Author / Producer
Date
2006
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
Editor
Book title
Journal / series
Volume
527-529
Pages / Article No.
787 - 790
Publisher
Trans Tech Publications
Event
International Conference on Silicon Carbide and Related Materials (ICSCRM 2005)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Dopant profiles; SCIVI; SE potential contrast; Sample preparation