Direct analysis of ultra-trace semiconductor gas by inductively coupled plasma mass spectrometry coupled with gas to particle conversion-gas exchange technique
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Author / Producer
Date
2015-09
Publication Type
Journal Article
ETH Bibliography
yes
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Altmetric
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Publication status
published
External links
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Book title
Journal / series
Volume
891
Pages / Article No.
73 - 78
Publisher
Elsevier
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Direct analysis; Gas exchange; Gas to particle conversion; Inductively coupled plasma mass spectrometry; Particle size distribution; Semiconductor gas
Organisational unit
03512 - Günther, Detlef / Günther, Detlef
Notes
Received 13 March 2015, Revised 12 June 2015, Accepted 18 June 2015, Published online 7 August 2015.