Effects of target bias voltage on indium tin oxide films deposited by high target utilisation sputtering
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Author / Creator
Date
2007
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Thin Solid Films
Volume
515 (24)
Pages / Article No.
8500 - 8504
Publisher
Elsevier
Event
First International Symposium on Transparent Conducting Oxides
Edition / version
Methods
Geographic location
Date collected
Date created
Subject
Indium tin oxide; Polyimide; Target bias; Sputtering; Thin films
Organisational unit
02498 - Zogg H., Dünnschichtphysik
Notes
Available online 1 April 2007.