Integration of a Fabrication Process for an Aluminum Single-Electron Transistor and a Scanning Force Probe for Tuning-Fork-Based Probe Microscopy
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Author / Producer
Date
2010
Publication Type
Journal Article
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yes
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Publication status
published
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Journal / series
Volume
19 (5)
Pages / Article No.
1088 - 1097
Publisher
IEEE
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Software
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Date created
Subject
Electron beam lithography (EBL); Micromachining; Microscopy; Nanolithography; Single-electron transistor (SET)
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Notes
Received November 14 2009, Revised April 25 2010, Accepted June 30 2010, Published September 15 2010.