Modeling the Kelvin polarization force actuation of micro- and nanomechanical systems


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Date

2010

Publication Type

Journal Article

ETH Bibliography

yes

Citations

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Data

Rights / License

Publication status

published

Editor

Book title

Volume

107 (5)

Pages / Article No.

54510

Publisher

American Institute of Physics

Event

Edition / version

Methods

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Date collected

Date created

Subject

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer check_circle

Notes

Received 20 November 2009, Accepted 7 January 2010, Published online 9 March 2010.

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