Simulation of the Measurement by Scanning Electron Microscopy of Edge and Linewidth Roughness Parameters in Nanostructures
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Author / Producer
Date
2015
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Journal / series
Volume
Pages / Article No.
205 - 208
Publisher
IEEE
Event
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo Modeling
Organisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)