MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a Single-Axis Accelerometer
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Author / Producer
Date
2009
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
52 (1)
Pages / Article No.
82 - 91
Publisher
IEEE
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Electrical engineering education; Fabrication; Laboratory course; Mechanical engineering education; Microelectro-mechanical systems (MEMS); Semiconductor