Transfer of carbon nanotubes onto microactuators for hysteresis-free transistors at low thermal budget
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Author / Producer
Date
2012
Publication Type
Conference Paper
ETH Bibliography
yes
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Publication status
published
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Book title
IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 2012 : Jan. 29, 2012 - Feb. 2, 2012, Paris, France
Journal / series
Volume
Pages / Article No.
1352 - 1355
Publisher
IEEE
Event
IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) 2012
Edition / version
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Date collected
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Subject
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer