Size effects in thin film nickel-based alloys for (N)MEMS applications
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Author / Producer
Date
2010
Publication Type
Doctoral Thesis
ETH Bibliography
yes
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Publication status
published
External links
Editor
Contributors
Examiner : Spolenak, Ralph
Examiner : Steurer, Walter
Book title
Journal / series
Volume
Pages / Article No.
Publisher
ETH Zurich
Event
Edition / version
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Date collected
Date created
Subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); NICKELLEGIERUNGEN; ELEKTRISCHE UND DIELEKTRISCHE EIGENSCHAFTEN DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); NICKEL ALLOYS; ELECTRICAL AND DIELECTRICAL PROPERTIES OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS)
Organisational unit
03692 - Spolenak, Ralph / Spolenak, Ralph
Notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 18998, 2010.