Thermal Probe Nanolithography
In-situ inspection, high-speed, high-resolution, 3D
METADATA ONLY
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Author / Producer
Date
2013
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Book title
29th European Mask and Lithography Conference
Journal / series
Volume
8886
Pages / Article No.
Publisher
SPIE
Event
29th European Mask and Lithography Conference
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Thermal Scanning Probe Lithography; Electron Beam Lithography; Mask Less Lithography; Direct Write; Polyphthalaldehyde; 3D Patterning; Pattern Transfer