Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature
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Author / Producer
Date
2006
Publication Type
Conference Paper
ETH Bibliography
yes
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Publication status
published
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Book title
Journal / series
Volume
352 (9-20)
Pages / Article No.
1466 - 1470
Publisher
Elsevier
Event
21st International Conference on Amorphous and Nanocrystalline Semiconductors
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Subject
II-VI semiconductors; Photovoltaics; Indium tin oxide and other transparent conductors
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Notes
Available online 20 March 2006.