TCAD analysis for VLSI-application-oriented process optimization
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Author / Producer
Date
2006
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Proceedings
Journal / series
Volume
Pages / Article No.
1306 - 1308
Publisher
IEEE
Event
8th International Conference on Solid-State and Integrated Circuit Technology
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
03228 - Fichtner, Wolfgang (emeritus)
Notes
Date of Current Version 23 April 2007.