Large deflection actuator for variable-ratio RF MEMS power divider application
METADATA ONLY
Loading...
Author / Producer
Date
2010
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Book title
MME Abstracts 2010 : 21st Micromechanics and Micro Systems Europe Workshop ; Enschede, The Netherland, 26 - 29 September 2010
Journal / series
Volume
Pages / Article No.
204 - 207
Publisher
Micromechanics and Micro Systems Europe Workshop
Event
21st Micromechanics and Micro Systems Europe Workshop (MME2010)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
RF power divider; Micro mirror; Vertical comb drive
Organisational unit
03472 - Professur für Feldtheorie (ehemalig)
03609 - Hierold, Christofer / Hierold, Christofer