Materials Properties Of Ultra-Thin Silicon Nanowire Arrays Fabricated By Euv Interference Lithography
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Author / Producer
Date
2017
Publication Type
Doctoral Thesis
ETH Bibliography
yes
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published
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Examiner : Spolenak, Ralph
Examiner : Niederberger, Markus
Examiner : Zardo, Ilaria
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Publisher
ETH Zurich
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Methods
Software
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03692 - Spolenak, Ralph / Spolenak, Ralph