A simultaneous dual-polarity mass spectrometer with electron start for MeV-SIMS
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Date
2021-11-15
Publication Type
Journal Article
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yes
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Abstract
The Capillary Heavy Ion MeV-SIMS Probe (CHIMP) at ETH Zürich has been redesigned with a second mass spectrometer and symmetric extraction to enable simultaneous analysis of positive and negative secondary ions. Secondary electrons are deflected within the negative spectrometer and detected independently. The fast secondary electron signal is used as a start signal for both Time-of-Flight mass spectrometers.
The new setup enables the simultaneous acquisition and analysis of both secondary ion polarities emitted under identical conditions from the same sample location. This allows to study correlations between secondary ions of different polarities emitted from a single primary ion impact. Measurements with small primary Cn cluster ions show the influence of cluster size on the multiplicity of secondary ion emission. Furthermore, a cluster effect in the ratio between positive and negative ion yields of corresponding secondary ion species is identified, with the ratio approaching parity for larger cluster sizes n.
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published
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Book title
Volume
507
Pages / Article No.
36 - 41
Publisher
Elsevier
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Software
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Date collected
Date created
Subject
MeV-SIMS; ToF-SIMS; Dual-polarity SIMS; Cluster ions; Secondary ion yield
Organisational unit
08619 - Labor für Ionenstrahlphysik (LIP) / Laboratory of Ion Beam Physics (LIP)
Notes
Funding
175653 - New Developments in Ion Beam Physics (SNF)