Design and applications of new MOCVD precursors for nitrogen-containing zirconium-based thin films
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Author / Producer
Date
2002
Publication Type
Doctoral Thesis
ETH Bibliography
yes
Citations
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Contributors
Examiner : Berke, Heinz
Examiner : Morstein, Marcus
Examiner : Spencer, Nicholas D.
Examiner : Zürcher, Stefan
Book title
Journal / series
Volume
Pages / Article No.
Publisher
ETH Zürich
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
ZIRKONIUM (CHEMISCHE ELEMENTE); STICKSTOFF (CHEMISCHE ELEMENTE); EIGENSCHAFTEN DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); ERZEUGUNG DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); ZIRCONIUM (CHEMICAL ELEMENTS); NITROGEN (CHEMICAL ELEMENTS); PROPERTIES OF THIN LAYERS (PHYSICS OF MOLECULAR SYSTEMS); PRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS)
Organisational unit
03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
Notes
Diss., Naturwissenschaften ETH Zürich, Nr. 14965, 2003.