Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas
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Author / Producer
Date
2016-08
Publication Type
Journal Article
ETH Bibliography
yes
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Rights / License
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Publication status
published
External links
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Book title
Journal / series
Volume
122
Pages / Article No.
149 - 156
Publisher
Elsevier
Event
Edition / version
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Geographic location
Date collected
Date created
Subject
Atomic Emission Spectroscopy; Laser Produced Plasma; Droplet Target; Vacuum Ultraviolet Emission; Extreme Ultraviolet Lithography
Organisational unit
03548 - Abhari, Reza S. / Abhari, Reza S.