Döbeli, M.2017-06-082017-06-0820080953-89841361-648X1361-648X10.1088/0953-8984/20/26/264010http://hdl.handle.net/20.500.11850/14751enCharacterization of oxide films by MeV ion beam techniquesJournal ArticleJournal of Physics: Condensed Matter2026