Ultra-Miniature and Low-Power Pressure Sensors Using Individual Carbon Nanotubes
Metadata only
Datum
2016-06Typ
- Journal Article
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Journal of Microelectromechanical SystemsBand
Seiten / Artikelnummer
Verlag
IEEEThema
Atomic layer deposition; Carbon nanotubes; Pressure sensor; Suspended gateOrganisationseinheit
03609 - Hierold, Christofer / Hierold, Christofer
Anmerkungen
Published online 9 March 2016, Current Version 30 May 2016.ETH Bibliographie
yes
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