CMOS readout and control architectures for monolithic hotplate and cantilever microsystems
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Date
2004Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-004691510Publication status
publishedExternal links
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Publisher
Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) ZürichSubject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); MIKROSYSTEMTECHNIK, MST; COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); MICRO SYSTEM TECHNOLOGIES, MSTOrganisational unit
03263 - Baltes, Henry
Notes
Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 15412, 2004.More
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ETH Bibliography
yes
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