Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization
Metadata only
Datum
2004-10Typ
- Journal Article
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
IEEE Transactions on Evolutionary ComputationBand
Seiten / Artikelnummer
Verlag
IEEEThema
Electron-beam lithography (EBL); Genetic algorithm (GA); Optimization; SimulationETH Bibliographie
yes
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