Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization
dc.contributor.author
Robin, Franck
dc.contributor.author
Moreno, Esteban
dc.date.accessioned
2017-06-14T19:07:35Z
dc.date.available
2017-06-14T19:07:35Z
dc.date.issued
2004-10
dc.identifier.issn
1089-778X
dc.identifier.issn
1941-0026
dc.identifier.other
10.1109/TEVC.2004.834198
dc.identifier.uri
http://hdl.handle.net/20.500.11850/160308
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Electron-beam lithography (EBL)
dc.subject
Genetic algorithm (GA)
dc.subject
Optimization
dc.subject
Simulation
dc.title
Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization
dc.type
Journal Article
ethz.journal.title
IEEE Transactions on Evolutionary Computation
ethz.journal.volume
8
ethz.journal.issue
5
ethz.journal.abbreviated
IEEE trans. evol. comput.
ethz.pages.start
506
ethz.pages.end
511
ethz.identifier.wos
ethz.identifier.nebis
001791610
ethz.publication.place
New York, NY
ethz.publication.status
published
ethz.date.deposited
2017-06-14T19:16:43Z
ethz.source
ECIT
ethz.identifier.importid
imp59364e77a326373952
ethz.ecitpid
pub:65294
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T15:38:18Z
ethz.rosetta.lastUpdated
2024-02-02T01:47:00Z
ethz.rosetta.versionExported
true
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