Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems
Metadata only
Date
2006Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaVolume
Pages / Article No.
Publisher
American Institute of PhysicsEvent
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Received 31 May 2006, Accepted 9 October 2006, Published 4 December 2006.More
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ETH Bibliography
yes
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