Combined Al-protection and HF-vapor release process for ultrathin single crystal silicon cantilevers
Metadata only
Autor(in)
Alle anzeigen
Datum
2006-04Typ
- Conference Paper
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Microelectronic EngineeringBand
Seiten / Artikelnummer
Verlag
ElsevierKonferenz
Thema
Ultrahigh sensitive cantilevers; HV vapor; Al thin films and MRFMAnmerkungen
Available online 28 February 2006.ETH Bibliographie
yes
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