Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
Metadata only
Date
2004-04Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierSubject
High-k dielectrics; MOCVD; Zirconium silicateOrganisational unit
03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
Notes
Available online 21 January 2004.More
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ETH Bibliography
yes
Altmetrics