Accuracy of scanning capacitance microscopy for the delineation of electrical junctions
Metadata only
Datum
2004-01Typ
- Journal Article
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaBand
Seiten / Artikelnummer
Verlag
American Institute of PhysicsAnmerkungen
Published online 4 February 2004.ETH Bibliographie
yes
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