Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and AtomsBand
Seiten / Artikelnummer
Verlag
North-HollandKonferenz
Thema
Cathodic arc evaporation; Coating; Metal ion etching; Rutherford backscattering spectrometry; Sputtering; TRIDYNAnmerkungen
Available online 15 March 2014. June 23-28, 2013.