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Autor(in)
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Datum
2014Typ
- Conference Paper
ETH Bibliographie
yes
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Abstract
A semi-flexible SU-8 polymer microdevice was designed to deflect in response to a change in surface tension at an air-water interface. The suspended microtensiometer encloses a clean water-air interface, while externally the device is surrounded by an interface containing an insoluble component. The difference in surface tension between the inside and outside of the device, called the surface pressure, causes the device to deflect. Finite element simulations were performed to predict device behavior prior to fabrication. Finished devices were tested in a Langmuir trough during multiple compression and expansion cycles, using a platinum Wilhelmy plate for an independent surface pressure measurement. A resolution of 0.16 mN/m was achieved. Mehr anzeigen
Persistenter Link
https://doi.org/10.3929/ethz-a-010345329Publikationsstatus
publishedExterne Links
Buchtitel
EUROSENSORS 2014, the 28th European Conference on Solid-State TransducersZeitschrift / Serie
Procedia EngineeringBand
Seiten / Artikelnummer
Verlag
ElsevierKonferenz
Thema
MEMS; SU-8; Interfacial rheology; Surface pressureOrganisationseinheit
02160 - Dep. Materialwissenschaft / Dep. of Materials09482 - Vermant, Jan / Vermant, Jan
ETH Bibliographie
yes
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