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Author
Date
2006Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-005352865Publication status
publishedExternal links
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Publisher
Physical Electronics Laboratory, ETH ZürichSubject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); MIKROSYSTEMTECHNIK, MST; RASTERKRAFTMIKROSKOPE, RKM + RASTERKRAFTMIKROSKOPIE; COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); MICRO SYSTEM TECHNOLOGIES, MST; ATOMIC FORCE MICROSCOPES, AFM + ATOMIC FORCE MICROSCOPYOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 16806, 2006.More
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ETH Bibliography
yes
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