Laser induced forward transfer of SnO2 for sensing applications using different precursors systems
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2013-02-01
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Journal Article
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yes
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Abstract
This paper presents the transfer of SnO₂ by laser induced forward transfer (LIFT) for gas sensor applications. Different donor substrates of SnO₂ with and without triazene polymer (TP) as a dynamic release layer were prepared. Transferring these films under different conditions were evaluated by optical microscopy and functionality. Transfers of sputtered SnO₂ films do not lead to satisfactory results and transfers of SnO₂ nanoparticles are difficult. Transfers of SnO₂ nanoparticles can only be achieved when applying a second laser pulse to the already transferred material, which improves the adhesion resulting in a complete pixel. A new approach of decomposing the transfer material during LIFT transfer was developed. Donor films based on UV absorbing metal complex precursors namely, SnCl₂(acac)₂ were prepared and transferred using the LIFT technique. Transfer conditions were optimized for the different systems, which were deposited onto sensor-like microstructures. The conductivity of the transferred material at temperatures of about 400 °C are in a range usable for SnO₂ gas sensors. First sensing tests were carried out and the transferred material proved to change conductivity when exposed to ethanol, acetone, and methane. © 2012 Springer-Verlag Berlin Heidelberg.
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published
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Journal of Applied Physics
Volume
110 (2)
Pages / Article No.
309 - 316
Publisher
Springer
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03421 - Wokaun, Alexander (emeritus)
02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
Notes
Received 22 November 2012, Accepted 22 November 2012, Published online 5 December 2012. It was possible to publish this article open access thanks to a Swiss National Licence with the publisher