Geometry based tunability enhancement of flexible thin-film varactors
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Date
2017-08
Publication Type
Journal Article
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yes
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Abstract
In this letter, flexible voltage-controlled capacitors (varactors) based on an amorphous Indium-Gallium-Zinc-Oxide (a-IGZO) semiconductor are presented. Two different varactor designs and their influence on the capacitance tuning characteristics are investigated. The first design consists of a top electrode finger structure which yields a maximum capacitance tunability of 6.9 at 10 kHz. Second, a novel interdigitated varactor structure results in a maximum tunability of 93.7 at 100 kHz. The design- and frequency-dependencies of the devices are evaluated through C-V measurements. Furthermore, we show bending stability of the devices down to a tensile radius of 6 mm without altering the performance. Finally, a varactor is combined with a thin-film resistor to demonstrate a tunable RC-circuit for impedance matching and low-pass filtering applications. The device fabrication flow and material stack are compatible with standard flexible thin-film transistor fabrication which enables parallel implementation of analog or logic circuitry and varactor devices.
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published
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Journal / series
Volume
38 (8)
Pages / Article No.
1117 - 1120
Publisher
IEEE
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Edition / version
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Date collected
Date created
Subject
Varactor; indium-gallium-zinc-oxide (IGZO); flexible electronics; thin-film technology; MOS
Organisational unit
03388 - Tröster, Gerhard (emeritus)
02634 - Institut für Elektronik / Institute for Electronics
Notes
Funding Info about funding
160347 - W I S D O M: Wireless Indium-Gallium-Zink-Oxide Transmitters and Devices on Mechanically Flexible Thin-Film Substrates (SNF)