Development of LPP Source Technology
dc.contributor.author
Rollinger, Bob
dc.contributor.author
Giovannini, Andrea
dc.contributor.author
Morris, Oran
dc.contributor.author
Henderson, Ian
dc.contributor.author
Abhari, Reza S.
dc.contributor.author
Ellwi, Samir
dc.date.accessioned
2018-02-28T10:18:34Z
dc.date.available
2017-06-09T09:02:35Z
dc.date.available
2018-02-28T10:18:34Z
dc.date.issued
2010
dc.identifier.isbn
978-1-61782-177-6
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/29130
dc.language.iso
en
en_US
dc.publisher
Curran
dc.title
Development of LPP Source Technology
en_US
dc.type
Other Conference Item
ethz.book.title
International Symposium on Extreme Ultraviolet Lithography 2010
en_US
ethz.journal.volume
3
en_US
ethz.pages.start
2104
en_US
ethz.size
1 p.
en_US
ethz.event
International Symposium on Extreme Ultraviolet Lithography 2010
en_US
ethz.event.location
Kobe, Japan
ethz.event.date
October 17-20, 2010
en_US
ethz.notes
Poster presentation
en_US
ethz.publication.place
Red Hook, NY
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-09T09:03:05Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d94bc19f51880
ethz.ecitpid
pub:48509
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2018-02-28T10:18:48Z
ethz.rosetta.lastUpdated
2024-02-02T04:02:01Z
ethz.rosetta.versionExported
true
ethz.COinS
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Other Conference Item [18985]