Selective Growth of Titanium Dioxide by Low-Temperature Chemical Vapor Deposition
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Date
2015Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
ACS Applied Materials & InterfacesVolume
Pages / Article No.
Publisher
American Chemical SocietySubject
selective area growth; titanium dioxide; self-assembled monolayer; silanization; titanium isopropoxide; chemical vapor deposition; atomic layer depositionMore
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ETH Bibliography
yes
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