Abstract
We report on sub-micrometer thick LiNbO3 films produced by an improved crystal ion slicing and bonding technique using polymer adhesive benzocyclobutene. The latter enables to reproducibly fabricate defect-free films with an area of several cm2. The method supports also integration of tuning electrodes enabling realization of complex electro-optically active photonic devices on a single chip. Furthermore, the structuring techniques to produce high-index-contrast (Δn ≈ 0.65) single-mode optical waveguides are described. The big potential of the novel LiNbO3 thin films for high-density integrated optics applications is shown on an example of electro-optically tunable microring resonator. Show more
Publication status
publishedExternal links
Journal / series
Optical MaterialsVolume
Pages / Article No.
Publisher
ElsevierEvent
Subject
Lithium niobate; Crystal ion slicing; Wafer bonding; Thin films; Integrated optics; Photonic devicesOrganisational unit
03255 - Günter, Peter
More
Show all metadata
ETH Bibliography
yes
Altmetrics