A comprehensive study of the impact of dislocation loops on leakage currents in Si shallow junction devices
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Date
2015-11Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Journal of Applied PhysicsVolume
Pages / Article No.
Publisher
American Institute of PhysicsNotes
Published online 9 November 2015.More
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ETH Bibliography
yes
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