Zero level packaging and long term stability of carbon nanotube-based transistors in pressure sensors
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Date
2008Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedBook title
Proceedings: Eurosensors XXIIPages / Article No.
Publisher
VDI/VDE-Ges. Mess- und AutomatisierungstechnikEvent
Subject
carbon nanotube; ALD; packaging; pressure sensorOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
Altmetrics