Design rules to control the tensile strain in Ge μ-membranes fabricated from GeOI substrates for photonics applications
Publication status
publishedExternal links
Book title
2015 IEEE 12th International Conference on Group IV Photonics (GFP)Pages / Article No.
Publisher
IEEEEvent
Organisational unit
03759 - Faist, Jérôme / Faist, Jérôme
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