Single-chip CMOS Capacitive Gas Sensor For Detection of Volatile Organic Compounds

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Author

Date

2002

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Book title

Proceedings of IEEE Sensors 2002

Volume

2

Pages / Article No.

1428 - 1431

Publisher

IEEE

Event

1st IEEE International Conference on Sensors, Orlando, FL, USA, June 12-14,2002

Subject

Sensor interface circuitry; Capacitive sensor; Gas sensor; Microsensor

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

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ETH Bibliography

yes

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