Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment
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Date
2016-09Type
- Journal Article
Citations
Cited 23 times in
Web of Science
Cited 25 times in
Scopus
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Surface and Coatings TechnologyVolume
Pages / Article No.
Publisher
ElsevierSubject
Cu; Immiscible materials; Multilayers; Sputter deposition; TaOrganisational unit
03692 - Spolenak, Ralph / Spolenak, Ralph
02891 - ScopeM / ScopeM
Notes
Received 3 April 2016, Revised 9 June 2016, Accepted 10 June 2016, Published online 11 June 2016.More
Show all metadata
Citations
Cited 23 times in
Web of Science
Cited 25 times in
Scopus
ETH Bibliography
yes
Altmetrics