Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment
- Journal Article
Journal / seriesSurface and Coatings Technology
Pages / Article No.
SubjectCu; Immiscible materials; Multilayers; Sputter deposition; Ta
Organisational unit03692 - Spolenak, Ralph / Spolenak, Ralph
02891 - ScopeM / ScopeM
NotesReceived 3 April 2016, Revised 9 June 2016, Accepted 10 June 2016, Published online 11 June 2016.
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