Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

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Author
Müller, Claudia M.
Sologubenko, Alla S.
Gerstl, Stephan S.A.
Süess, Martin J.
Courty, Diana
Spolenak, Ralph
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Date
2016-09
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Surface and Coatings Technology
Volume
302
Pages / Article No.
284 - 292
Publisher
Elsevier
Subject
Cu; Immiscible materials; Multilayers; Sputter deposition; Ta
Organisational unit
03692 - Spolenak, Ralph  
02891 - Scientific Centre for OPtical and Electron Microscopy (ScopeM) / Scientific Centre for OPtical and Electron Microscopy (ScopeM)  
Notes
Received 3 April 2016, Revised 9 June 2016, Accepted 10 June 2016, Published online 11 June 2016.
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Citations
Cited 5 times in Web of Science
ETH Bibliography
yes
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