Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment - Research Collection

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Author

Müller, Claudia M.

Sologubenko, Alla S.

Gerstl, Stephan S.A.

Süess, Martin J.

Courty, Diana

Spolenak, Ralph

Date

2016-09

Type

Journal Article

Citations

Cited 8 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.surfcoat.2016.06.024

Journal / series

Surface and Coatings Technology

Volume

302

Pages / Article No.

284 - 292

Publisher

Elsevier

Subject

Cu; Immiscible materials; Multilayers; Sputter deposition; Ta

Organisational unit

03692 - Spolenak, Ralph / Spolenak, Ralph
02891 - ScopeM / ScopeM

Notes

Received 3 April 2016, Revised 9 June 2016, Accepted 10 June 2016, Published online 11 June 2016.

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Citations

Cited 8 times in Web of Science

ETH Bibliography

yes

Altmetrics