Effect of isopropanol on gold assisted chemical etching of silicon microstructures
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Date
2017-06-05Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierSubject
Silicon microfabrication; Au nanostructures; X-ray gratings; Anisotropic wet etching; Metal assisted chemical etchingOrganisational unit
03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.
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