Magnetgelagertes pumpsystem für die Halbleiterfertigung
dc.contributor.author
Neff, Martin
dc.contributor.supervisor
Hugel, Jörg
dc.contributor.supervisor
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-13T04:26:16Z
dc.date.available
2017-06-13T04:26:16Z
dc.date.issued
2003
dc.identifier.uri
http://hdl.handle.net/20.500.11850/147784
dc.identifier.doi
10.3929/ethz-a-004629807
dc.format
application/pdf
dc.language.iso
de
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
HALBLEITER + HALBLEITERTECHNOLOGIE (ELEKTROTECHNIK)
dc.subject
FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK
dc.subject
MAGNETLAGER (MASCHINENELEMENTE)
dc.subject
SCHEIBENLÄUFERMOTOREN (ELEKTRISCHE MASCHINEN)
dc.subject
PUMPEN (MASCHINENBAU)
dc.subject
SEMICONDUCTORS + SEMICONDUCTOR TECHNOLOGY (ELECTRICAL ENGINEERING)
dc.subject
PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS
dc.subject
MAGNETIC BEARINGS (MACHINE COMPONENTS)
dc.subject
DISK MOTORS (ELECTRICAL MACHINES)
dc.subject
PUMPS AND PUMPING (MECHANICAL ENGINEERING)
dc.title
Magnetgelagertes pumpsystem für die Halbleiterfertigung
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
145 S.
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::620 - Engineering & allied operations
ethz.notes
Diss., Technische Wissenschaften ETH Zürich, Nr. 15217, 2003.
ethz.identifier.diss
15217
ethz.identifier.nebis
004629807
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.leitzahl
03200 - Hugel, Jörg
ethz.date.deposited
2017-06-13T04:27:17Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a754837399717
ethz.ecolpid
eth:26858
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-19T08:55:48Z
ethz.rosetta.lastUpdated
2020-02-15T01:49:32Z
ethz.rosetta.versionExported
true
ethz.COinS
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Doctoral Thesis [29815]