High-Dynamics Low-Cost Flow Control with Solenoid Actuator for Ultra-High Purity Applications
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Date
2010Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Publisher
IEEEEvent
Subject
Flow control; solenoid; ultra-high purityOrganisational unit
03573 - Kolar, Johann W. / Kolar, Johann W.
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ETH Bibliography
yes
Altmetrics