A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
Metadata only
Datum
2009Typ
- Journal Article
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Journal of Microelectromechanical SystemsBand
Seiten / Artikelnummer
Verlag
IEEEThema
Calibration; force measurement; microelectromechanical devices; microsensors; torque measurementOrganisationseinheit
03627 - Nelson, Bradley J. / Nelson, Bradley J.
ETH Bibliographie
yes
Altmetrics