Measurement of Young's modulus and residual stress of atomic layer deposited Al2O3 and Pt thin films
Publication status
publishedExternal links
Journal / series
Journal of Micromechanics and MicroengineeringVolume
Pages / Article No.
Publisher
IOP PublishingSubject
atomic layer deposition; mechanical test structure; elastic constant; Young’s modulus; residual stress; platinum; aluminum oxideMore
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