Fabrication and Characterization of Self-scrolling Si/Cr Micro- and Nanostructures
dc.contributor.author
Zhang, Li
dc.contributor.author
Dong, Lixin
dc.contributor.author
Bell, Dominik J.
dc.contributor.author
Nelson, Bradley J.
dc.contributor.author
Grützmacher, Detlev
dc.date.accessioned
2017-06-09T05:29:38Z
dc.date.available
2017-06-09T05:29:38Z
dc.date.issued
2006
dc.identifier.isbn
978-1-4244-0139-0
dc.identifier.isbn
1-4244-0139-9
dc.identifier.other
10.1109/NEMS.2006.334712
dc.identifier.uri
http://hdl.handle.net/20.500.11850/22596
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Flexibility
dc.subject
Nanoring
dc.subject
Nanospiral
dc.subject
Nanorobotic manipulation
dc.subject
NEMS
dc.title
Fabrication and Characterization of Self-scrolling Si/Cr Micro- and Nanostructures
dc.type
Conference Paper
ethz.book.title
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
ethz.pages.start
1268
ethz.pages.end
1271
ethz.event
1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2006 (NEMS 2006)
ethz.event.location
Zhuhai, China
ethz.event.date
January 18-21, 2006
ethz.identifier.nebis
005548776
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.date.deposited
2017-06-09T05:29:51Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d027c6ab84020
ethz.ecitpid
pub:37464
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T14:44:23Z
ethz.rosetta.lastUpdated
2022-03-28T08:52:30Z
ethz.rosetta.versionExported
true
ethz.COinS
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Conference Paper [34961]