Pt Gate Sink-In Process Details Impact on InP HEMT DC and RF Performance
dc.contributor.author
Saranovac, Tamara
dc.contributor.author
Hambitzer, Anna
dc.contributor.author
Ruiz, Diego C.
dc.contributor.author
Ostinelli, Olivier
dc.contributor.author
Bolognesi, Colombo R.
dc.date.accessioned
2019-03-06T13:33:25Z
dc.date.available
2018-01-25T12:11:45Z
dc.date.available
2018-03-08T09:19:40Z
dc.date.available
2019-03-06T13:33:25Z
dc.date.issued
2017-11
dc.identifier.issn
0894-6507
dc.identifier.issn
1558-2345
dc.identifier.other
10.1109/TSM.2017.2749479
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/234441
dc.language.iso
en
en_US
dc.publisher
IEEE
en_US
dc.subject
Milimeter wave transistors
en_US
dc.subject
Rapid thermal annealing
en_US
dc.subject
Semiconductor device manufacture
en_US
dc.title
Pt Gate Sink-In Process Details Impact on InP HEMT DC and RF Performance
en_US
dc.type
Journal Article
dc.date.published
2017-09-07
ethz.journal.title
IEEE Transactions on Semiconductor Manufacturing
ethz.journal.volume
30
en_US
ethz.journal.issue
4
en_US
ethz.pages.start
462
en_US
ethz.pages.end
467
en_US
ethz.publication.place
New York, NY
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::03721 - Bolognesi, Colombo / Bolognesi, Colombo
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00003 - Schulleitung und Dienste::00022 - Bereich VP Forschung / Domain VP Research::02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::03721 - Bolognesi, Colombo / Bolognesi, Colombo
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00003 - Schulleitung und Dienste::00022 - Bereich VP Forschung / Domain VP Research::02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
ethz.date.deposited
2018-01-25T12:11:46Z
ethz.source
FORM
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2018-03-08T09:19:46Z
ethz.rosetta.lastUpdated
2024-02-02T07:16:47Z
ethz.rosetta.versionExported
true
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Journal Article [128907]