Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates
Publication status
publishedExternal links
Journal / series
Thin Solid FilmsVolume
Pages / Article No.
Publisher
ElsevierSubject
Plasma enhanced chemical vapor deposition; Silicon oxide; Fragmentation test; Crack onset strain; Internal stresses; AdhesionOrganisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
Notes
Received 2 February 2006, Revised 22 November 2006, Accepted 6 December 2006, Available online 19 December 2006.More
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