Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution
- Journal Article
Journal / seriesJournal of microelectromechanical systems
SubjectAluminum; Anodic dissolution; Detachment; Metal; Release; Sacrificial layer; Sodium chloride
NotesManuscript received 02 March 2004, Revised 03 September 2004.
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