Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution
Metadata only
Date
2005-04Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Journal of Microelectromechanical SystemsVolume
Pages / Article No.
Publisher
IEEESubject
Aluminum; Anodic dissolution; Detachment; Metal; Release; Sacrificial layer; Sodium chlorideNotes
Manuscript received 02 March 2004, Revised 03 September 2004.More
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ETH Bibliography
yes
Altmetrics