Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field

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Author
Beyeler, Felix
Neild, Adrian P.
Oberti, Stefano
Bell, Dominik J.
Sun, Yu
Dual, Jürg
Nelson, Bradley J.
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Date
2007
Type
    Journal Article
Publication status
published
External links
Journal / series
Journal of Microelectromechanical Systems
Volume
16(1)
Pages / Article No.
7 - 15
Publisher
IEEE
Subject
Capacitive force sensor; Electrostatic microgripper; Force feedback; Handling biological cells; HeLa cancer cells; Microeletromechanical systems (MEMS); Micromanipulation; Silicon-on-insulator (SOI) fabrication; Ultrasonic positioning
Organisational unit
03307 - Dual, Jürg (emeritus) / Dual, Jürg (emeritus)  
03627 - Nelson, Bradley J. / Nelson, Bradley J.  
Notes
Manuscript received January 9 2006, Revised August 7 2006.
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