Fabrication and characterization of a tethered rotational planar variable capacitance micro drive
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Date
2012-05Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Journal of Micromechanics and MicroengineeringVolume
Pages / Article No.
Publisher
IOP PublishingOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Received 16 November 2011.More
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ETH Bibliography
yes
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